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Intellectual Property
Fundamental Nanolithography
Parent Dip Pen Nanolithograph® Filing
This family of applications and patents describes the fundamental, initial invention of Dip Pen Nanolithography (DPN®) technology. It covers technology related to the direct, high resolution deposition of compounds at nanoscale using sharp tips, including scanning probe microscope tips.
| US 6,635,311 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, October 2003 |
| US 2004/0028814 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, February 2004 |
| TW 150875 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, January 2002 |
| WO 2000/41213 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, July 2000 |
| AU 778568 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, April 2005 |
| CA 2358215 AA | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, July 2000 |
| ZL 00803987.9 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, November 2006 |
| JP 2002-539955 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, November 2002 |
First Major Continuation-in-Part Filing
This family, a continuation of the Parent Filing, builds upon the original invention by adding numerous additional working examples and industrial applications of the process. It also includes fundamental examples of parallel, multiple tip patterning and automation of the process with software and environmental control.
| US 6,827,979 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, December 2004 |
| WO 01/91855 A1 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, December 2001 |
| TW 190487 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Granted, March 2004 |
| AU 0165003 A5 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, December 2001 |
| CA 2411198 AA | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, December 2001 |
| CN 1444494 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, September 2003 |
| EP 1292361 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, March 2003 |
| JP 2003-534141 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, November 2003 |
| US 2005/0172704 A1 | Methods Utilizing Scanning Probe Microscope Tips And Products Therefor Or Produced Thereby | Published, August 2005 |
Aperture Pen Nanolithography
This family of applications concerns DPN patterning with hollowed or similarly shaped tips, which could be employed to build patterns more quickly. It also describes the driving forces useful to control the flow of patterning compounds from such tips.
| US 2005/019434 A1 | Nanolithography Methods And Products Therefor Or Produced Thereby | Published, September 2005 |
Calibration of Feature Size of DPN Patterns
This family describes a method of controlling SPM devices to calibrate the size of features created by DPN patterning. The feature employs a number of software algorithms and depends on control of environmental conditions and patterning speed.
| US 7,060,977 | Nanolithographic Calibration Methods | Granted, June 2006 |
Alignment of DPN Patterns
This family describes a method of aligning features created via DPN patterning with extremely high precision. The method, which works for successive DPN patterning steps and integration with other forms of lithography, employs SPM, integrated video capture, and novel software algorithms.
| US 2003/0185967 A1 | Method and Apparatus for Aligning Patterns on a Substrate | Published, October 2003 |
| TW 200304540 | Method and Apparatus for Aligning Patterns on a Substrate | Allowed, August 2006 |
| WO 2003/083876 A2 | Method and Apparatus for Aligning Patterns on a Substrate | Published, October 2003 |
DPN Patterning with Stamp-Like Tips
This family describes the manufacture and use of so-called "stamp tips" in the DPN patterning process. These tips are useful for patterning large amounts of material and patterning on rougher surfaces.
| US 2005/0255237 A1 | Direct-Write Nanolithography with Stamp Tip Fabrication and Applications | Published, November 2005 |
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